Vibrating gyroscope consisting of three layers of polysilicon thin films

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 114-119

  Tsuchiya, Toshiyuki ^a   Kageyama, Yasuyuki ^a   Funabashi, Hirofumi ^a   Sakata, Jiro ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; GYROSCOPES; MULTILAYERS; NATURAL FREQUENCIES; OSCILLATIONS; POLYCRYSTALLINE MATERIALS; THIN FILMS; VIBRATIONS (MECHANICAL);

POLYSILICON THIN FILMS; VIBRATING GYROSCOPES;

SILICON SENSORS;

EID: 0033741542     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00371-4     Document Type: Article

References (6)

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