Optimal design and noise consideration of micromachined vibrating rate gyroscope with modulated integrative differential optical sensing

Journal of Microelectromechanical Systems

Volumn 7, Issue 3, 1998, Pages 329-338

  Degani, Ofir ^b   Seter, Dan J ^b,c,d   Socher, Eran ^b   Kaldor, Shmuel ^b,c,e   Nemirovsky, Yael ^a,b,e,f,g  

^a IEEE

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^c RAFAEL   (Israel)

^d MEMS Group in RAFAEL   (Israel)

^e Technion ^*  (Israel)

^f R and D Organization

^g Microlectron and Photonics Section   (Israel)

Author keywords

Gyroscope; MEMOS; MIDOS; Noise; Optical; Rate

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTROSTATICS; INTEGRATED CIRCUIT LAYOUT; MICROMACHINING; OPTICAL SENSORS; PHOTODIODES; SPURIOUS SIGNAL NOISE;

MICROMACHINED VIBRATING RATE GYROSCOPES; MODULATED INTEGRATIVE DIFFERENTIAL OPTICAL SENSING; NOISE EQUIVALENT RATE (NER);

GYROSCOPES;

EID: 0032166278     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.709652     Document Type: Article

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