Microtechnology in the development of three-dimensional circuits

IEEE Transactions on Microwave Theory and Techniques

Volumn 46, Issue 11 PART 2, 1998, Pages 1832-1844

  Herrick, Katherine J ^a   Yook, Jong Gwan ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Coplanar waveguide; Micromachining; Microstrip; MMIC

Indexed keywords

MICROMACHINING; MICROSTRIP DEVICES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; WAVEGUIDES;

HIGH DENSITY INTEGRATION (HDI);

MICROELECTROMECHANICAL DEVICES;

EID: 0032206780     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.734496     Document Type: Article

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