Modeling analysis of excimer laser crystallization of a-Si films with nanosecond temperature response

Materials Science Forum

Volumn 505-507, Issue PART 1, 2006, Pages 283-288

  Chang, Chien Hung ^a   Chao, Long Sun ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Laser crystallized technology; Poly Si thin film; Specific heat enthalpy method

Indexed keywords

CRYSTALLIZATION; ENTHALPY; EXCIMER LASERS; HEAT TRANSFER; IRRADIATION; NUMERICAL METHODS; POLYSILICON; SOLIDIFICATION;

LASER CRYSTALLIZED TECHNOLOGY; MATERIAL PROPERTIES; SILICON LAYERS; SPECIFIC HEAT/ENTHALPY METHOD;

THIN FILMS;

EID: 33847694509     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-990-3.283     Document Type: Conference Paper

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