Finite element analysis on nanoindentation with friction contact at the film/substrate interface

Composites Science and Technology

Volumn 67, Issue 7-8, 2007, Pages 1311-1319

  Huang, Xiaoqin ^a   Pelegri, Assimina A ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

A. Nanostructures; B. Friction Wear; B. Interface; C. Finite element analysis; Nanoindentation

Indexed keywords

COATINGS; FINITE ELEMENT METHOD; FRICTION; MECHANICAL PROPERTIES; NANOSTRUCTURES; THIN FILMS; WEAR OF MATERIALS;

BERKOVICH NANOINDENTER; FILM/SUBSTRATE-FRICTION-CONTACT (F/SFC) MODEL; FILM/SUBSTRATE-PERFECTLY-BONDED (F/SPB) MODEL;

NANOINDENTATION;

COATING; FILM; FINITE ELEMENT ANALYSIS; FRICTION; INTERFACIAL PROPERTY; MECHANICAL PROPERTY; NANOCOMPOSITE; WEAR;

EID: 33847692645     PISSN: 02663538     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compscitech.2006.10.005     Document Type: Article

References (39)

1. Lyshevski S.E. Nano- and microelectromechanical systems (2000), CRC Press, Boca Raton (FL)
2. Madou M. Fundamentals of microfabrication (1997), CRC Press, Boca Raton (FL)
3. Jitcharoen J., et al. Hertzian-crack suppression in ceramics with elastic-modulus-graded surfaces. J Am Ceram Soc 81 (1998) 2301-2308
4. Kesler O., et al. Measurement of residual stress in plasma-sprayed metallic, ceramic and composite coatings. Mater Sci Eng A 257 2 (1998) 215-224
5. Summary E. Workshop on silicon nanoelectronics and beyond. Hillsboro (OR): Intel's Jones Farm Conference Center; 2003.
6. Bahr DF et al. Reliability and properties of PZT thin films for MEMS applications. Materials research society symposium proceedings, vol. 546; 1999. p. 153-8.
7. Bahr D.F., et al. Adhesion and acoustic emission analysis of failures in nitride films with a metal interlayer. Acta Mater 45 12 (1997) 5163-5175
8. Baker SP, Nix WD. Mechanical properties of thin films on substrates. In: Optical thin films III: new developments, Proc SPIE; 1990.
9. Bamber M.J., et al. Accurate determination of Young's modulus and Poisson's ratio of thin films by a combination of acoustic microscopy and nanoindentation. Thin Solid Films 398-399 (2001) 299-305
10. Chang S.J., Su Y.K., and Shei Y.P. High quality ZnO thin films on InP substrates prepared by radio frequency magnetron sputtering. II. Surface acoustic wave device fabrication. J Vac Sci Technol A 13 2 (1995) 385-388
11. Chen X., and Vlassak J.J. Numerical study on the measurement of thin film mechanical properties by means of nanoindentation. J Mater Res 16 10 (2001) 2974-2982
12. 3 by metal organic chemical vapor deposition. Rutgers University at New Brunswick; 1999.
13. Gonda V., and Toonder J.d. Finite thickness influence on spherical and conical indentation on viscoelastic thin polymer film. J Electron Packaging 127 1 (2005) 33-37
14. Murakami Y., et al. Elastic analysis of triangular pyramidal indentation by the finite-element method and its application to nano-indentation measurement of glasses. Philos Mag A 69 6 (1994) 1131-1153
15. Larsson P.L., et al. Analysis of Berkovich indentation. Int J Solids Struct 33 2 (1996) 221-248
16. Huang X., and Pelegri A.A. Mechanical characterization of thin film materials with nanoindentation measurements and FEM analysis. J Eng Mater Technol (2004)
17. Bhattacharya A.K., and Nix W.D. Finite element simulation of indentation experiments. Int J Solids Struct 24 9 (1988) 881-891
18. Laursen T.A., and Simo J.C. A study of the mechanical of microindentation using finite elements. J Mater Res 7 3 (1992) 618-626
19. Bolshakov A., Oliver W.C., and Pharr G.M. Influences of stress on the measurement of mechanical properties using nanoindentation: Part II. finite element simulations. J Mater Res 11 3 (1996) 760-768
20. Cheng Y.-T., and Cheng C.-M. Analysis of indentation loading curves obtained using conical indenters. Philos Mag Lett 77 1 (1998) 39-47
21. Lichinchi M., et al. Simulation of Berkovich nanoindentation experiments on thin films using finite element method. Thin Solid Films 312 (1998) 240-248
22. Knapp J.A., et al. Finite-element modeling of nanoindentation. J Appl Phys 85 3 (1999) 1460-1474
23. Volinsky A.A., Moody N.R., and Gerberich W.W. Interfacial toughness measurements for thin films on substrates. Acta Mater 50 (2002) 441-466
24. Evans A.G., Hutchinson J.W., and He M.Y. Micromechanics model for the detachment of residually compressed brittle films and coatings. Acta Mater 47 (1999) 1513-1522
25. Pindera M.J., Aboudi J., and Arnold S.M. The effect of interface roughness and oxide film thickness on the inelastic response of thermal barrier coatings to thermal cycling. Mater Sci Eng A 284 (2000) 158-175
26. Brandon J.R., and Taylor R. Thermal properties of ceria and yttria partially stabilized zirconia thermal barrier coatings. Surf Coatings Technol 39/40 (1989) 143-151
27. Nesbitt J.A. Thermal response of various thermal barrier coatings in a high heat flux rocket engine. Surf Coatings Technol 43 (1990) 458-469
28. Pang M, Baker SP. Quantitative measurements of subcritical debonding of Cu films from glass substrates. In: Materials research society symposium proceedings, vol. 766; 2003. p. 183-8.
29. Deng K, Ko WH. In: Proceedings of the IEEE solid-state and actuator workshop, Hilton Head Island (SC); 1992.
30. Komvopoulos K. Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theory. J Adhes Sci Technol 17 4 (2003) 477-517
31. Suzuki S., et al. Proc IEEE micro electro mechanical systems (1991), Nara, Japan
32. Hibbitt KS. Inc., ABAQUS. Pawtucket, RI; 2002.
33. Oliver W.C., and Pharr G.M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J Mater Res 7 6 (1992) 1564-1583
34. Doerner M.F., and Nix W.D. A method for interpreting the data from depth-sensing indentation instruments. J Mater Res 1 4 (1986) 601-609
35. Sneddon I.N. The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile. Int J Eng Sci 3 (1965) 47-57
36. Lubliner J. Plasticity theory (1990), Macmillan Publishing Company, New York
37. Dieter G. Mechanical metallurgy (1976), McGraw-Hill, New York
38. Gan L., Ben-Nissan B., and Ben-David A. Modelling and finite element analysis of ultra-microhardness indentation of thin films. Thin Solid Films 290-291 (1996) 362-366
39. Huang X., and Pelegri A.A. Nanoindentation measurements on low-k porous silica thin films spin coated on silicon substrates. J Eng Mater Technol 125 (2003) 361-367