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Volumn 766, Issue , 2003, Pages 183-188
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Quantitative measurements of subcritical debonding of Cu films from glass substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
CHROMIUM;
CRACK PROPAGATION;
DEBONDING;
FLAT PANEL DISPLAYS;
GLASS;
SUBSTRATES;
THIN FILMS;
KINETIC CRACK MODEL;
SILICATE GLASS SUBSTRATES;
STRAIN ENERGY;
COPPER;
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EID: 0348199124
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-766-e2.8 Document Type: Conference Paper |
Times cited : (2)
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References (14)
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