Mechanical properties of thin films on substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1323, Issue , 1990, Pages 263-276

  Baker, S P ^a   Nix, W D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS--MECHANICAL PROPERTIES; OPTICAL VARIABLES MEASUREMENT; SUBSTRATES;

INTERNAL STRESSES;

OPTICAL MATERIALS;

EID: 0025534871     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.22398     Document Type: Conference Paper

References (20)