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Volumn 13, Issue 6, 2006, Pages 789-793
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Catalytic effects of ferrocene on bonding, optical and structural properties of diamond-like carbon films deposited by microwave surface-wave plasma chemical vapor deposition
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Author keywords
Diamond like carbon; Ferrocene; Optical band gap; Surface wave plasma CVD
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Indexed keywords
CATALYST ACTIVITY;
CHEMICAL BONDS;
DIAMOND LIKE CARBON FILMS;
OPTICAL BAND GAPS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SCATTERING;
SURFACE WAVES;
X RAY PHOTOELECTRON SPECTROSCOPY;
FERROCENE;
FERROCENE-INDUCED GRAPHITIZATION;
FILM DEPOSITION;
QUARTZ SUBSTRATES;
OLEFINS;
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EID: 33847654295
PISSN: 0218625X
EISSN: None
Source Type: Journal
DOI: 10.1142/S0218625X06008864 Document Type: Article |
Times cited : (2)
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References (15)
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