Sheath expansion in a drifting, nonuniform plasma

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2648-2650

  Keidar, M ^a,b   Brown, I G ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033260751     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591040     Document Type: Article

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