Measurement of in-plane and depth strain profiles in strained-Si substrates

Solid-State Electronics

Volumn 51, Issue 2, 2007, Pages 219-225

  Ogura, Atsushi ^a   Kosemura, Daisuke ^a   Yamasaki, Kosuke ^a   Tanaka, Satoshi ^a   Kakemura, Yasuto ^a   Kitano, Akiko ^b   Hirosawa, Ichiro ^b  

^a MEIJI UNIVERSITY   (Japan)

^b JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); RAMAN SCATTERING; SEMICONDUCTING SILICON; ULTRAVIOLET DETECTORS; X RAY DIFFRACTION ANALYSIS;

DEPTH STRAIN PROFILES; IN-PLANE X-RAY DIFFRACTION (XRD); SILICON-GERMANIUM-ON INSULATOR (SGOI); WAFER MAPPING;

SILICON;

EID: 33847361905     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.01.002     Document Type: Article

References (18)

1. Takagi S., Hoyt J.L., Welser J.J., and Gibbons J.F. J Appl Phys 80 (1996) 1567
2. Leitz G.W., Currie M.T., Lee M.L., Cheng Z.-Y., Antoniadis D.A., and Fiztgerald E.A. J Appl Phys 92 (2003) 3745
3. Rim K., Hoyt J.L., and Gibbons J.F. IEEE Trans Electron Dev 47 (2000) 1406
4. Mizuno T., Sugiyama N., Tezuka T., Numata T., and Takagi S. IEEE Trans Electron Dev 50 (2003) 988
5. Sugii N., Hisamoto D., Washio K., Yokoyama N., and Kimura S. IEEE Trans Electron Dev 49 (2002) 2237
6. Sugii N. J Appl Phys 8 (2001) 6459
7. Tezuka T., Sugiyama N., and Takagi S. Appl Phys Lett 79 (2001) 1798
8. Klauk H., Jackson T.N., Nelson S.F., and Chu J.O. Appl Phys Lett 68 (1996) 975
9. Holtz M., Duncan W.M., Zollner S., and Liu R. J Appl Phys 88 (2000) 2523
10. Nakashima S., Yamamoto T., Ogura A., Uejima K., and Yamamoto T. Appl Phys Lett 84 (2004) 2533
11. Burke H.H., and Herman I.P. Phys Rev B 48 (1993) 15016
12. Magidson V., and Beserman R. Phys Rev B 66 (2002) 195206
13. Ogura A., Yamasaki K., Kosemura D., Tanaka S., Chiba I., and Shimidzu R. Jpn J Appl Phys 45 (2006) 3007
14. Vineayard G.H. Phys Rev B 26 (1982) 4146
15. Kutsukake K., Usami N., Ujihara T., Fujiwara K., Sazaki G., and Nakajima K. Appl Phys Lett 85 (2004) 1335
16. Sawano K., Koh S., Shiraki Y., Usami N., and Nakagawa K. Appl Phys Lett 83 (2003) 4339
17. Watanabe H., Yoshida S., Watanabe Y., Shimura T., Yasutake K., Akasaka Y., et al. Jpn J Appl Phys 45 (2006) 2933
18. De Wolf I. Semicond Sci Technol 11 (1996) 139