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Volumn 45, Issue 4 B, 2006, Pages 3007-3011
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UV-Raman spectroscopy system for local and global strain measurements in Si
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Author keywords
RTA; SGOI; SSOI; Starin; UV Raman spectroscopy
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Indexed keywords
CALIBRATION;
RAMAN SPECTROSCOPY;
RAPID THERMAL ANNEALING;
RESONANCE;
STRAIN MEASUREMENT;
ULTRAVIOLET SPECTROSCOPY;
SGOI;
SSOI;
STARIN;
UV-RAMAN SPECTROSCOPY;
SILICON;
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EID: 33646916313
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.45.3007 Document Type: Article |
Times cited : (102)
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References (14)
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