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Volumn 45, Issue 4 B, 2006, Pages 3007-3011

UV-Raman spectroscopy system for local and global strain measurements in Si

Author keywords

RTA; SGOI; SSOI; Starin; UV Raman spectroscopy

Indexed keywords

CALIBRATION; RAMAN SPECTROSCOPY; RAPID THERMAL ANNEALING; RESONANCE; STRAIN MEASUREMENT; ULTRAVIOLET SPECTROSCOPY;

EID: 33646916313     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.3007     Document Type: Article
Times cited : (102)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.