Optical properties of antimony-implanted ZnO epilayers

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6797-6799

  Ke, Xianwen ^a   Shan, Fukai ^b   Park, Young Shin ^c   Wang, Yunjin ^a   Zhang, Wenzhe ^a   Kang, Tae Won ^c   Fu, Dejun ^a  

^a WUHAN UNIVERSITY   (China)

^b Dong Eui University   (South Korea)

^c Dongguk University   (South Korea)

Author keywords

Implantation; Optical properties; Sb; ZnO

Indexed keywords

EPILAYERS; ION BOMBARDMENT; ION IMPLANTATION; OPTICAL PROPERTIES; OXIDE FILMS; PHOTOLUMINESCENCE; RAMAN SCATTERING; RAPID THERMAL ANNEALING;

ENERGETIC ION BOMBARDING; ZINC OXIDE EPILAYERS; ZINC OXIDE FILMS;

ZINC OXIDE;

EPILAYERS; ION BOMBARDMENT; ION IMPLANTATION; OPTICAL PROPERTIES; OXIDE FILMS; PHOTOLUMINESCENCE; RAMAN SCATTERING; RAPID THERMAL ANNEALING; ZINC OXIDE;

EID: 33847348063     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.077     Document Type: Article

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