Structure and mechanical properties of TiBN coatings fabricated by dc reactive sputtering technique

Journal of Materials Processing Technology

Volumn 186, Issue 1-3, 2007, Pages 362-366

  Garcia Gonzalez L ^a   Hernandez Torres J ^b   Garcia Ramirez P J ^a   Martinez Castillo J ^a   Sauceda, Ángel ^a   Herrera May, A L ^a   Espinoza Beltran F J ^c  

^a UNIVERSIDAD VERACRUZANA   (Mexico)

^b UNIVERSIDAD DEL PAPALOAPAN   (Mexico)

^c INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

Author keywords

Coatings; Hardness; Nanoindentation; TiBN; XRD

Indexed keywords

BALL MILLING; COATINGS; ENERGY DISPERSIVE SPECTROSCOPY; HARDNESS; INDENTATION; PHASE COMPOSITION; PHASE MEASUREMENT; X RAY DIFFRACTION;

DC REACTIVE SPUTTERING TECHNIQUES; NANOINDENTATION; REACTIVE BALL MILLING;

TITANIUM COMPOUNDS;

EID: 33847340084     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.01.002     Document Type: Article

References (23)

1. Vepřek S., and Reiprich S. A concept for the design of novel superhard coatings. Thin Solid Films 268 (1995) 64-71
2. He Y., Apachitei I., Zhou J., Walstock T., and Duszczyk J. Effect of prior plasma nitriding applied to a hot-work tool steel on the scratch-resistant properties of PACVD TiBN and TiCN coatings. Surf. Coat. Technol. 201 (2006) 2534-2539
3. Bareiβ J.C., Hackl G., Popovska N., Rosiwal S.M., and Singer R.F. CVD diamond coating of steel on a CVD-TiBN interlayer. Surf. Coat. Technol. 201 (2006) 718-723
4. Holubar P., Jilek M., and Sima M. Present and possible future applications of superhard nanocomposite coatings. Surf. Coat. Technol. 133-134 (2000) 145-151
5. Holzschuh H. Deposition of Ti-B-N (single and multilayer) and Zr-B-N coatings by chemical vapor deposition techniques on cutting tools. Thin Solid Films 469-470 (2004) 92-98
6. Chaleix L., and Machet J. Study of the composition and of the mechanical properties of TiBN films obtained by D.C. magnetron sputtering. Surf. Coat. Technol. 91 (1997) 74-82
7. y coatings. J. Vac. Sci. Technol. A 15 (1997) 284-291
8. J. Neidhardt, M. O'Sullivan, A.E. Reiter, W. Rechberger, W. Grogger, C. Mitterer, Structure-property-performance relations of high-rate reactive arc-evaporated Ti-B-N nanocomposite coatings, Surf. Coat. Technol., in press.
9. Aouadi S.M., Namavar F., Gorishnyy T.Z., and Rohde S.L. Characterization of TiBN films grown by ion beam assisted deposition. Surf. Coat. Technol. 160 (2002) 145-151
10. Shtansky D.V., Sheveiko A.N., Petrzhik M.I., Kiryukhantsev-Korneev F.V., Levashov E.A., Leyland A., Yerokhin A.L., and Matthews A. Hard tribological Ti-B-N, Ti-Cr-B-N, Ti-Si-B-N and Ti-Al-Si-B-N coatings. Surf. Coat. Technol. 200 (2005) 208-212
11. Son M.J., Kang S.S., Lee E.-A., and Kim K.H. Properties of TiBN coating on the tool steels by PECVD and its applications. J. Mater. Process. Technol. 130-131 (2002) 266
12. Djouadi M.A., Vasin A., Nouveau C., Angleraud B., and Tessier P.Y. Deposition of boron nitride films by PVD methods: transition from h-BN to c-BN. Surf. Coat. Technol. 180-181 (2004) 174-177
13. Ye J., and Oechsner H. On the nucleation of the cubic phase in boron nitride films. Thin Solid Films 514 (2006) 138-144
14. Pierson J.F., Bertran F., Bauer J.P., and Jolly J. Structural and electrical properties of sputtered titanium boronitride films. Surf. Coat. Technol. 142-144 (2001) 906-910
15. Budak E., and Bozkurt C. The effect of transition metals on the structure of h-BN intercalation compounds. J. Solid State Chem. 177 (2004) 1768-1770
16. McKeehan M., and Warren B.E. X-ray study of cold work in thoriated tungsten. J. Appl. Phys. 24 (1953) 52-56
17. Espinoza-Beltrán F.J., Che-Soberanis O., García-González L., and Morales-Hernández J. Effect of the substrate bias potential on crystalline grain size, intrinsic stress and hardness of vacuum arc evaporated TiN/c-Si coatings. Thin Solid Films 437 (2003) 170-175
18. Novotny H., Benesovsky F., Brukl C., and Schob O. Die Dreistoffe: Titan-Bor-Kohlenstoff und Titan-Bor-Stickstoff. Monatsch. Chem. 92 (1961) 403
19. Wiedemann R., Weihnacht V., and Oettel H. Structure and mechanical properties of amorphous Ti-B-N coatings. Surf. Coat. Technol. 116-119 (1999) 302-309
20. 2 films prepared by ion beam sputtering. Surf. Coat. Technol. 78 (1996) 37-41
21. Hong S.I., Hill M.A., and Kim H.S. Strength and ductility of heavily drawn bundled Cu-Nb filamentary microcomposite wires with various Nb contents. Scripta Mater. 48 1 (2003) 43-49
22. Kim H.S. Hardening behaviour of partially crystallised amorphous Al alloys. Mater. Sci. Eng. A 304-306 (2001) 327-331
23. Kim H.S., and Hong S.I. A model on the ductile-brittle transition of partially crystallized amorphous Al-Ni-Y alloys. Acta Mater. 47 (1999) 2059-2066