Deposition of boron nitride films by PVD methods: Transition from h-BN to c-BN

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 174-177

  Djouadi, M A ^a   Vasin, A ^b   Nouveau, C ^b   Angleraud, B ^a   Tessier, P Y ^a  

^a INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

^b ENSAM   (France)

Author keywords

C BN; FTIR spectroscopy; HRTEM; R BN

Indexed keywords

CUBIC BORON NITRIDE; HIGH RESOLUTION ELECTRON MICROSCOPY; MOLECULAR STRUCTURE; NANOSTRUCTURED MATERIALS; THICKNESS MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY;

BURIED LAYERS; RHOMBOHEDRAL STRUCTURE;

PROTECTIVE COATINGS;

COATING;

EID: 1842815845     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.156     Document Type: Article

References (11)

1. Cardinale G.F. Mirkarimi P.B. McCarty K.F. Klaus E.J. Medelin D.L. Clift W.M.et-al Thin Solid Films 253 1994 130
2. Kester D.J. Messier R. J. Appl. Phys. 72 1992 504
3. Bonizzi A. Checchetto R. Miotello A. Ossi P.M. Europhys. Lett. 44 1998 627
4. Ben el Mekki M. Djouadi M.A. Guiot E. Mortet V. Surf. Coat. Technol. 116-119 1999 93-99
5. McKenzie D.R. McFall W.D. Sainty W.G. Davis C.A. Collins R.E. Diamond Relat. Mater. 2 1993 970
6. Robertson J. Diamond Relat. Mater. 2 1993 984
7. Ben el Mekki M. Djouadi M.A. Mortet V. Guiot E. Nouet G. Mestres N. Thin Solid Films 352 1999 1-7
8. Djouadi M.A. Khandozkho S. Mortet V. Ilias S. Stambouli V. Diamond Relat. Mater. 10 2001 2167-2173
9. Djouadi M.A. Banakh O. Soltani A. Sanjines R. Levy F. Thin Solid Films 398/399 2001 205-209
10. Fukarek W. Abstracts of 7th International Symposium on Trends and Applications of Thin Films TATF 2000. Nancy, France, 28-30 March 2000 1-10
11. Medlin D.L. Mirkarimi P.B. McCarty K.F. Phys. Rev. B 50 11 1994 7884