Study on the method for the reliability test of focused ion beam

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 569-577

  Lee, Sang H ^a   Kang, Hyun Wook ^a   Cho, Dong Woo ^a   Moon, Wonkyu ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY;

FABRICATED PATTERNS; FOCUSED ION BEAM (FIB) SYSTEMS; SCALE MEASUREMENT SYSTEMS;

ION BEAMS;

EID: 33847269129     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0227-7     Document Type: Article

References (10)

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