A method for in situ measurement of the residual stress in thin films by using the focused ion beam

Thin Solid Films

Volumn 443, Issue 1-2, 2003, Pages 71-77

  Kang, K J ^a   Yao, N ^b   He, M Y ^c   Evans, A G ^c  

^a Chonnam National University   (South Korea)

^b Princeton University   (United States)

^c University of California   (United States)

Author keywords

Diamond like carbon; Focused ion beam; Residual stress; Strain mapping

Indexed keywords

DIAMOND LIKE CARBON FILMS; ION BEAMS; RESIDUAL STRESSES; STRAIN;

FOCUSED ION BEAMS (FIB);

THIN FILMS;

EID: 0141865602     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00946-5     Document Type: Article

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