Synthesis of cubic boron nitride films with mean ion energies of a few eV

Journal of Applied Physics

Volumn 101, Issue 3, 2007, Pages

  Teii, Kungen ^a,b   Yamao, Ryota ^c   Yamamura, Toshifumi ^c   Matsumoto, Seiichiro ^d  

^a KYUSHU UNIVERSITY   (Japan)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^d Ceramic Forum Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; CUBIC BORON NITRIDE; FLUORINE; ION BOMBARDMENT; SYNTHESIS (CHEMICAL);

FLUX RATIOS; ION IMPACT ENERGIES; THRESHOLD ION ENERGY;

THIN FILMS;

EID: 33847138992     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2431401     Document Type: Article

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