Independent control of ion energy and flux in plasma-enhanced diamond growth

Applied Physics Letters

Volumn 74, Issue 26, 1999, Pages 4067-4069

  Teii, Kungen ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001553610     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123263     Document Type: Article

References (11)

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