An analysis of beam deflections in poly-SiGe cantilevers

7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006

Volumn 2006, Issue , 2006, Pages

  Gonzalez, Mario ^a   Van Barel, Gregory ^a   Witvrouw, Ann ^a   Vandevelde, Bart ^a  

^a IMEC   (Belgium)

Author keywords

Cantilevers; Finite element modeling; Poly SiGe; Stress gradient; Stress profile

Indexed keywords

COMPUTATIONAL GEOMETRY; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); MATHEMATICAL MODELS; SILICON ALLOYS; THIN FILMS;

BEAM DEFLECTIONS; CANTILEVERS; STRESS GRADIENT; STRESS PROFILES;

CANTILEVER BEAMS;

EID: 33847124513     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESIME.2006.1643974     Document Type: Conference Paper

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