MeV heavy ion beam induced epitaxial crystallization of buried Si 3N4 layer

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 244, Issue 1, 2006, Pages 213-216

  Som, T ^a   Satpati, B ^a   Sinha, O P ^a,d   Mishra, N C ^b   Kanjilal, D ^c  

^a INSTITUTE OF PHYSICS   (India)

^b UTKAL UNIVERSITY   (India)

^c INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^d Icfai Institute of Science and Technology   (India)

Author keywords

Ion beam induced epitaxial crystallization; Swift heavy ions; Transmission electron microscopy

Indexed keywords

ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION; SOLID PHASE; SWIFT HEAVY IONS;

CRYSTALLIZATION; EPITAXIAL GROWTH; HEAVY IONS; ION BEAMS; TRANSMISSION ELECTRON MICROSCOPY;

SILICON COMPOUNDS;

EID: 33847093239     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.11.037     Document Type: Conference Paper

References (27)

1. J. Linnros, G. Holmen, and B. Svensson Phys. Rev. B 30 1984 3692
2. J. Linnros, and G. Holmen J. Appl. Phys. 59 1986 1513
3. J.S. Williams, R.G. Elliman, N.L. Brown, and T.E. Seidel Phys. Rev. Lett. 55 1985 1482
4. J. Nakata Phys. Rev. B 43 1991 14643
5. J. Nakata J. Appl. Phys. 79 1996 682
6. J.K.N. Lindner, K. Voltz, and B. Stritzker Mater. Sci. Forum 248-249 1997 73
7. V. Heera, J. Stoemenos, R. Kögler, and W. Skorupa J. Appl. Phys. 77 1995 2999
8. P.K. Sahoo, T. Som, D. Kanjilal, and V.N. Kulkarni Nucl. Instr. and Meth. B 240 2005 239
9. G. Cembali, P.G. Merli, and F. Zignani Appl. Phys. Lett. 38 1981 808
10. M. Berti, A.V. Drigo, G. Lulli, P.G. Merli, and M. Vittori Antisari Phys. Status Solidi A 94 1986 85
11. M. Berti, A.V. Drigo, G. Lulli, P.G. Merli, and M. Vittori Antisari Phys. Status Solidi A 97 1986 77
12. W. Skorupa J.P. Colinge Physical and Technical Problems of SOI Structures and Devices 1995 Kluwer Academic Publishers Amsterdam 39
13. .
14. R.A. Yankov, F.F. Komarov, and S.A. Petrov Vacuum 44 1993 1077
15. M. Levalois, and P. Mary Nucl. Instr. and Meth. B 156 1999 64 and references therein
16. W. Wesch, A. Kamarou, and E. Wendler Nucl. Instr. and Meth. B 225 2004 111
17. JCPDS-International Center for Diffraction Data, Powder Diffraction File # 41-0360, ICDD, Newton Square, PA, 2000.
18. K. Watanabe, Y. Anzai, N. Nakanishi, T. Yamazaki, K. Kuramochi, K. Mitsuishi, K. Furuya, and I. Hashimoto Appl. Phys. Lett. 84 2004 4520
19. T. Som, B. Satpati, O.P. Sinha, and D. Kanjilal J. Appl. Phys. 98 2005 013532
20. G.H. Vineyard Radiat. Eff. Def. Solids 29 1976 254
21. M.L. Brongersma, E. Snoeks, and A. Polman Appl. Phys. Lett. 71 1997 1628
22. M. Toulemonde, J.M. Costantini, Ch. Dufour, A. Meftah, E. Paumier, and F. Studer Nucl. Instr. and Meth. B 116 1996 37
23. A. Meftah, F. Brisard, J.M. Costantini, M. Hage-Ali, M. Hervieu, J.P. Stoquert, F. Studer, and M. Toulemonde Phys. Rev. B 49 1994 12457
24. M. Toulemonde, C. Dufour, and E. Paumier Phys. Rev. B 46 1992 14362
25. G. Lulli, P.G. Merli, and M.V. Antisari Phys. Rev. B 36 1987 8038
26. P.K. Sahoo, Ph.D. Thesis, Indian Institute of Technology, Kanpur, 2004.
27. G.D. Watkins Radiation Damage in Semiconductors 1985 Dunod Paris p. 97