Analytical approach to estimating AMHS performance in 300mm fabs

International Journal of Production Research

Volumn 45, Issue 3, 2007, Pages 571-590

  Nazzal, Dima ^a   Mcginnis, Leon F ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

AMHS; Markov chain; Semiconductor manufacturing; Vehicle blocking

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; DECISION SUPPORT SYSTEMS; MARKOV PROCESSES; MATERIALS HANDLING; PRODUCTION CONTROL; STATISTICAL METHODS;

AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS); COMPUTATION TIMES; SEMICONDUCTOR MANUFACTURING; VEHICLE BLOCKING;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 33847067597     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540600792333     Document Type: Conference Paper

References (31)

1. Arzt, T. and Bulcke, F., A new low cost approach in 200 mm and 300 mm AMHS. Semiconductor Fabtech, 1999, available online at: http://www.fabtech.org.
2. Bakkalbasi, O., Flow path network design and layout configuration. PhD thesis, Georgia Institute of Technology, 1990.
3. Bartholdi III, J.J. and Platzman, L.K., Decentralized control of automated guided vehicles on a simple loop. IIE Trans, 1989, 21, 76-81.
4. Benjaafar, S., Modeling and analysis of congestion in the design facility layouts. Manage. Sci., 2002, 48, 679-705.
5. Bonora, T. and Feindel, D., New tools and fab demand 300mm automation optimization. Solid State Technol., 2001, 44, 87-89.
6. Bozer, Y.A., Srinivasan, M.M. and Myeonsig, C., Tandem configurations for Automated Guided Vehicle systems and the analysis of Single vehicle loops. IIE Trans., 1991, 23, 72-82.
7. Bozer, Y.A., Myeonsig, C. and Srinivasan, M.M., Expected waiting times in single-device trip-based material handling systems. Eur. J. Oper. Res, 1994, 75, 200-216.
8. Curry, G.L., Peters, B.A. and Lee, M., Queueing network model for a class of material-handling systems. Int. J. Prod. Res, 2003, 41, 3901-3920.
9. Gaxiola, G. and Mackulak, G., Simulation analysis of a semiconductor handling and processing system: process instability can lead to wasted modeling efforts. in Proceedings of the 31st Annual Summer Computer Simulation Conference, 1999, pp. 137-142.
10. Hopp, W. and Spearman, M., Factory Physics, 2nd ed., 2000 (McGraw-Hill).
11. Johnson, M.E., Modeling empty vehicle traffic in AGVS design. Int. J. Prod. Res., 2001, 39, 2615-2633.
12. Johnson, M.E. and Brandeau, M.L, An analytic model for design and analysis of single-vehicle asynchronous material handling systems. Transport. Sci., 1994, 28, 337-353.
13. Johnson, M.E. and Brandeau, M.L, Designing multiple-load automated guided vehicle systems for delivering material from a central depot. Trans. ASME J. Engng Industry, 1995, 117, 33-41.
14. Jones, S., 300 mm perceptions and realities. Semiconductor Int., 2003, 26, 69-72.
15. Kobza, J.E., Yu-Cheng, S. and Reasor, R.J., A stochastic model of empty-vehicle travel time and load request service time in light-traffic material handling systems. IIE Trans., 1998, 30, 133-142.
16. Lin, J.T., Wang, F.K.G. and Wu, C.K., Connecting transport AMHS in a wafer fab. Int. J. Prod. Res., 2003, 41, 529-544.
17. Mackulak, G. and Savory, P., A simulation based experiment for comparing AMHS performance in a semiconductor fabrication facility. IEEE Trans. Semiconductor Manuf, 2001, 14, 273-280.
18. Mackulak, G., Lawrence, F. and Colvin, T., Effective simulation model reuse: a case study for AMHS modeling. in Proceedings of the 1998 Winter Simulation Conference, pp. 979-984.
19. Nadoli, G. and Pillai, D., Simulation in automated material handling systems design for semiconductor manufacturing. in Proceedings of the 1994 Winter Simulation Conference, pp. 892-899.
20. Peters, B.A. and Yang, T., Integrated facility layout and material handling system design in semiconductor fabrication facilities. IEEE Trans. Semiconductor Manuf., 1997, 10, 360-369.
21. Pillai, D., Quinn, T., Kryder, K. and Charlson, D., Integration of 300mm fab layouts and material handling automation, in Proceedings of the IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium, 1999, pp. 23-26.
22. Roeder, T., Govind, N. and Schruben, L., A Queuing network approximation of semiconductor automated material handling systems: how much information do we really need? In Proceedings of the 2004 Winter Simulation Conference, pp. 1956-1961.
23. Ross, S., Introduction to Probability Models, 7th ed., 2000 (Academic Press).
24. Rust, K., Wright, R. and Shopbell, M., Comparative analysis of 300mm automated material handling systems, in Proceeding of the Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), 2002, pp. 240-245.
25. SEMATECH Report. 1997, Global joint guidelines for 300mm semiconductor factories I300I/J300. Available online at International SEMATECH website: http://www.sematech.org.
26. Srinivasan, M.M., Bozer, Y.A. and Myeonsig, C., Trip-based material handling systems: throughput capacity analysis. IIE Trans., 1994, 26, 70-89.
27. Steele, J., An algorithm for estimating the performance of an automated material handling system for the semiconductor industry. In Proceeding of the Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), 2002, pp. 229-234.
28. Ting, J.H. and Tanchoco, J.M., Unidirectional circular layout for overhead material handling systems. Int. J. Prod. Res., 2000, 38, 3913-3936.
29. Ting, J.H. and Tanchoco, J.M., Optimal bidirectional layout for overhead material handling systems. IEEE Transactions on Semiconductor Manufacturing, 2001, 14, 57-64.
30. Wolff, R.W., Poisson arrivals see time averages. Oper. Res., 1982, 30, 223-231.
31. Vis, I.F., Survey of research in the design and control of automated guided vehicle systems. Eur. J. Oper. Res., in press. Available online November 2004.