Solving tough semiconductor manufacturing problems using data mining

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2000, Pages 46-55

  Gardner, Robert ^a   Bieker, Jack ^a   Elwell, Steve ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA MINING; DATA REDUCTION; LEARNING SYSTEMS; NEURAL NETWORKS; PATTERN RECOGNITION; PROCESS CONTROL; STATISTICAL METHODS;

RULE INDUCTION; SELF ORGANIZING MAPS; YIELD ENHANCEMENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034475352     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)