From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)

Materials Science in Semiconductor Processing

Volumn 5, Issue 4-5 SPEC., 2002, Pages 333-339

  Oechsner, Richard ^a   Pfeffer, Markus ^a   Pfitzner, Lothar ^a   Binder, Harald ^b   Müller, Eckhard ^b   Vonderstrass, Thomas ^b  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b M+W Zander Facility Engineering GmbH   (Germany)

Author keywords

Overall equipment efficiency; Overall factory efficiency; State model

Indexed keywords

CODES (STANDARDS); COMPUTER SOFTWARE; COSTS; DIES;

OVERALL EQUIPMENT EFFICIENCY;

ELECTRONIC EQUIPMENT;

EID: 0036960197     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(03)00011-8     Document Type: Conference Paper

References (10)

1. The International Technology Roadmap for Semiconductors (ITRS), 2001.
2. Ward, Ed et al., Accelerated Time to Market for Future 300-mm Fabs, Solid State Technology, November 1997. p. 99.
3. SEMI E35-0701 - Cost of Ownership for Semiconductor Manufacturing Equipment Metrics.
4. SEMI E79-0200 - Standard for Definition and Measurement of Equipment Productivity.
5. SEMI E10-0701 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM).
6. SEMI E58-0301 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services.
7. SEMI E93-0200 - Provisional Specification for CIM Framework Advanced Process Control Component.
8. Scott D, Pisa R. Can Overall Factory Effectiveness Prolong Moore's Law, SEMICON Singapore Test Assembly and Packaging, SEMI, 1998.
9. SEMI Draft Document 3454 - Provisional Guideline for Definition and Calculation of Overall Factory Efficiency (OFE) and other Associated Factory-Level Productivity Metrics.
10. Razzak MA, et al., Factory Level Metrics: Basis for Productivity Improvement, Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2002), April 10-12, Tempe, Arizona, USA, 2002.