Effect of amorphous silicon shape on its metal-induced lateral crystallization rate

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3387-3390

  Kim, Y S ^a   Kim, M S ^a   Joo, S K ^a  

^a Seoul National University   (South Korea)

Author keywords

Crystallization; Nickel; Silicon; Stress

Indexed keywords

CRYSTALLIZATION; NICKEL; OPTICAL MICROSCOPY; PHASE TRANSITIONS; RAPID THERMAL ANNEALING; RATE CONSTANTS; STRESSES;

CRYSTALLINE SILICON; GLASS SUBSTRATE; METAL-INDUCED LATERAL CRYSTALLIZATION (MILC); NICKEL LAYERS;

AMORPHOUS SILICON;

EID: 33846926107     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.09.054     Document Type: Article

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