The effects of crystal filtering on growth of silicon grains in metal-induced lateral crystallization

Electrochemical and Solid-State Letters

Volumn 9, Issue 2, 2006, Pages

  Kim, Min Sun ^a   Lee, Jang Sik ^a,b   Kim, Young Su ^a   Joo, Seung Ki ^a  

^a Seoul National University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL FILTERS; CRYSTALLIZATION; DIFFRACTION; ELECTRON SCATTERING; GRAIN SIZE AND SHAPE; POLYSILICON; SCANNING ELECTRON MICROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTAL FILTERING; ELECTRON BACKSCATTERING DIFFRACTIONS; METAL-INDUCED LATERAL CRYSTALLIZATION (MILC); SURFACE-CRYSTALLOGRAPHIC ORIENTATION;

CRYSTAL GROWTH;

EID: 33645501427     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2142155     Document Type: Article

References (8)

1. S. W. Lee and S. K. Joo, IEEE Electron Device Lett., 17, 160 (1996).
2. T. H. Ihn, T. K. Kim, B. I. Lee, and S. K. Joo, Microelectron. Reliab., 39, 53 (1999).
3. O. K. B. Lui, M. J. Quinn, S. W.-B. Tam, T. M. Brown, P. Migliorato, and H. Ohshima, IEEE Electron Device Lett., 45, 213 (1998).
4. C. Hayzelden and J. L. Batstone, J. Appl. Phys., 73, 8279 (1993).
5. H. A. Atwater, C. V. Thompson, H. I. Smith, and M. W. Geis, Appl. Phys. Lett., 43, 1126 (1983).
6. Y. Kobayashi and A. Fukami, IEEE Electron Device Lett., 5, 458 (1984).
7. R. Ishihara, P. Ch. van der Wilt, B. D. van Dijk, J. W. Metselaar, and C. I. M. Beenakker, Proc. SPIE, 5004, 10 (2003).
8. M. J. Aziz, P. C. Sabin, and G-Q. Lu, Phys. Rev. B, 44, 9812 (1991).