Molecular dynamics study of surface modification with a glancing angle gas cluster ion beam

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 255, Issue 1 SPEC. ISS., 2007, Pages 265-268

  Aoki, Takaaki ^a   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Damage formation; Gas cluster ion beam; Molecular dynamics; Silicon; Surface scattering

Indexed keywords

COLLOIDS; COMPUTER SIMULATION; ION BEAMS; KINETIC ENERGY; SILICON; SURFACE TREATMENT;

DAMAGE FORMATION; GAS CLUSTER ION BEAM; SURFACE SCATTERING;

MOLECULAR DYNAMICS;

EID: 33846911977     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.11.071     Document Type: Article

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