Low damage smoothing of magnetic materials using oblique irradiation of gas cluster ion beam

Materials Research Society Symposium Proceedings

Volumn 843, Issue , 2005, Pages 183-188

  Kakuta, Shigeru ^a,c   Sasaki, Shinji ^a,c   Furusawa, Kenji ^a,c   Seki, Toshio ^c   Aoki, Takaaki ^c   Matsuo, Jiro ^b  

^a HITACHI LTD   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c Advanced Quantum Beam Technology   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HARD DISK STORAGE; ION BEAMS; IRRADIATION; MAGNETIC RECORDING; OXYGEN; SURFACE ROUGHNESS;

GAS CLUSTER ION BEAM (GCIB) TECHNOLOGY; HARD DISK DRIVES (HDD); LOW DAMAGE SMOOTHING; OBLIQUE IRRADIATION;

MAGNETIC MATERIALS;

EID: 20344378956     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. I. Yamada, J. Matsuo, N. Toyoda and A. Kirkpatrick, Mater.Sci.Eng. R.34 (2001) 231.
2. T. Seki, J. Matsuo, G. H. Takaoka and I. Yamada, Nucl. Instr. and Meth. in Phys. Res. B 206 (2003) 903.
3. R.M. Bradley and J.M.E. Harper, J. Vac. Sci. Technol. A6 (1988) 2390.
4. I. Koponen, M. Hautara and O.-P. Sievänen, Phys. Rev. Lett. 78 (1997) 2612.
5. W.L. Chanm N. Pavenayotin and E. Chason, Phys. Rev. B 69 (2004) 245413.