Molecular dynamics simulations of surface modification and damage formation by gas cluster ion impacts

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 517-519

  Aoki, Takaaki ^a,b   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

^b Collaborative Research Center for Advanced Quantum Beam Process Technology ^*  (Japan)

Author keywords

Cluster ion beam; Damage formation; Molecular dynamics

Indexed keywords

COMPUTER SIMULATION; ION BEAMS; ION IMPLANTATION; MATHEMATICAL MODELS; SURFACE TREATMENT;

CLUSTER ION BEAM; CLUSTER SIZE; DAMAGE FORMATION; GAS CLUSTERS;

MOLECULAR DYNAMICS;

EID: 28544446828     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.09.011     Document Type: Conference Paper

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