Quantitative TEM characterizations of La/B4C and Mo/B4C ultrathin multilayer gratings by the geometric phase method

Microelectronic Engineering

Volumn 84, Issue 3, 2007, Pages 454-459

  Haussler D ^a   Spiecker, E ^a   Jager W ^a   Stormer M ^b   Bormann, R ^b   Michaelsen, C ^c   Wiesmann, J ^c   Zwicker, G ^d   Benbalagh, R ^e   Andre J M ^e   Jonnard, P ^e  

^a UNIVERSITY OF KIEL   (Germany)

^b INSTITUTE OF MATERIALS RESEARCH   (Germany)

^c Incoatec GmbH ^*  (Germany)

^d FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

^e SORBONNE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; MULTILAYERS; OPTICAL PROPERTIES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

BRAGG DIFFRACTION; GEOMETRIC PHASE METHOD; X-RAY FILTERS;

LANTHANUM COMPOUNDS;

EID: 33846906180     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.060     Document Type: Article

References (11)

1. Stearns D.G., Rosen R.S., and Vernon S.P. Appl. Opt. 32 (1993) 6952
2. Kortright J.B., Gullikson E.M., and Denham P.E. Appl. Opt. 32 (1993) 6961
3. Product information of Bruker AXS and Philips AXR.
4. Ricardo P., Wiesmann J., Nowak C., Michaelsen C., and Bormann R. Appl. Opt. 40 (2001) 2747
5. Michaelsen C., Wiesmann J., Bormann R., Nowak C., Dieker C., Hollensteiner S., and Jäger W. Opt. Lett. 26 (2001) 792
6. C. Michaelsen, R. Bormann, Pat. Appl. WO 00/75646 A2.
7. Hÿtch M.J., Snoeck E., and Kilaas R. Ultramicroscopy 74 (1998) 131
8. Hÿtch M.J., Putaux J.-L., and Pénisson J.-M. Nature 423 (2003) 270
9. Häussler D., Spiecker E., Yang S., Jäger W., Störmer M., Bormann R., and Zwicker G. Phys. Stat. Sol. 202 (2005) 2299
10. Benbalagh R., André J.-M., Barchewitz R., Jonnard P., Julié G., Mollard L., Rolland G., Rémond C., Troussel P., Marmoret R., and Filatova E.O. Nucl. Instr. and Meth. in Phy. Res. A 541 (2005) 590
11. Hüe F., Johnson C.L., Lartigue-Korinek S., Wang G., Buseck P.R., and Hÿtch M.J. J. Electr. Micro. 54 (2005) 181