Improved analyzer multilayers for aluminium and boron detection with x-ray fluorescence

Applied Optics

Volumn 40, Issue 16, 2001, Pages 2747-2754

  Ricardo, Paulo ^a   Wiesmann, Jörg ^a   Nowak, Claudia ^a   Michaelsen, Carsten ^a   Bormann, Rüdiger ^a  

^a INSTITUTE OF MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BORON; FLUORESCENCE; SILICON WAFERS; X RAYS;

X-RAY FLUORESCENCE;

MULTILAYERS;

EID: 0001726587     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.002747     Document Type: Article

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