Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 541, Issue 3, 2005, Pages 590-597

  Benbalagh, Rabah ^a   André, Jean Michel ^a   Barchewitz, Robert ^a   Jonnard, Philippe ^a   Julié, Gwénaelle ^b   Mollard, Laurent ^c   Rolland, Guy ^c   Rémond, Christian ^d   Troussel, Philippe ^d   Marmoret, Rémy ^d   Filatova, Elena O ^e  

^a SORBONNE UNIVERSITÉ   (France)

^b UNIVERSITÉ PARIS SACLAY   (France)

^c CEA LETI   (France)

^d CEA DIF   (France)

^e ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

Bragg reflectors; Diffraction gratings; Multilayers; X ray optics

Indexed keywords

BANDWIDTH; DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; MONOCHROMATORS; REACTIVE ION ETCHING; SPECTROMETRY; SYNCHROTRON RADIATION; X RAY OPTICS;

BRAGG REFLECTORS; DIFFRACTION PATTERN; LAMELLAR MULTILAYER AMPLITUDE GRATING (LMAG); X-RAY SPECTROMETRIC ANALYSIS;

MULTILAYERS;

EID: 20144385482     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2004.12.015     Document Type: Article

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