Preparation and characteristics of indium tin oxide (ITO) thin films at low temperature by r.f. magnetron sputtering

Rare Metals

Volumn 25, Issue 6 SUPPL. 1, 2006, Pages 137-140

  Ren, Bingyan ^a   Liu, Xiaoping ^a,b   Wang, Minhua ^a,b   Xu, Ying ^b  

^a HEBEI UNIVERSITY OF TECHNOLOGY   (China)

^b Beijing Solar Energy Research Institute   (China)

Author keywords

Annealing; ITO; Low temperature; r.f. magnetron sputtering

Indexed keywords

ANNEALING; APPLICATIONS; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SOLAR CELLS; THIN FILMS;

INDIUM TIN OXIDE (ITO); SURFACE MORPHOLOGY;

FILM PREPARATION;

EID: 33846850596     PISSN: 10010521     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1001-0521(07)60060-6     Document Type: Article

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