|
Volumn 617, Issue , 2000, Pages J3131-J3136
|
Room temperature growth of indium tin oxide films by ultraviolet-assisted pulsed laser deposition
a b a a c |
Author keywords
[No Author keywords available]
|
Indexed keywords
ELECTRIC CONDUCTIVITY;
EXCIMER LASERS;
FILM GROWTH;
PULSED LASER DEPOSITION;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTING SILICON;
SUBSTRATES;
X RAY PHOTOELECTRON SPECTROSCOPY;
ULTRAVIOLET-ASSISTED PULSED LASER DEPOSITION (UVPLD);
THIN FILMS;
|
EID: 0034439082
PISSN: 02729172
EISSN: None
Source Type: Journal
DOI: 10.1557/PROC-617-J3.13 Document Type: Article |
Times cited : (5)
|
References (20)
|