Monte Carlo strategies for simulations of electron backscattering from surfaces

Surface and Interface Analysis

Volumn 37, Issue 11, 2005, Pages 861-874

  Jablonski, A ^a   Powell, C J ^b   Tanuma, S ^c  

^a INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

AES; Backscattering factor; Monte Carlo simulations

Indexed keywords

ALGORITHMS; AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; ELECTRIC EXCITATION; MONTE CARLO METHODS;

AES; BACKSCATTERING FACTOR;

ELECTRON SCATTERING;

EID: 28744438079     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.2104     Document Type: Conference Paper

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