Effect of thermal annealing on microstructural properties of Ti/Ge 2 Sb 2 Te 5 /Ti thin films deposited on SiO 2 /Si substrates by a sputtering method

Applied Surface Science

Volumn 253, Issue 8, 2007, Pages 4041-4044

  Kim, S Y ^a   Lee, H S ^a   Chung, I S ^a   Park, Y J ^b   Lee, J Y ^b   Kim, T W ^c  

^a Kyungpook National University   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

Diffusion; Ge 2 Sb 2 Te 5; Transmission electron microscopy

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; MICROSTRUCTURE; SPUTTERING; SUBSTRATES; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

INTERMIXING LAYERS; MICROSTRUCTURAL PROPERTIES; THERMAL ANNEALING;

THIN FILMS;

EID: 33846587452     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.08.038     Document Type: Article

References (16)

1. Yamada N., Ohno E., Nishiuchi K., Akahira N., and Takao M. J. Appl. Phys. 69 (1991) 2849
2. Jeong T.H., Kim M.R., Seo H., Kim S.J., and Kim S.Y. J. Appl. Phys. 86 (1999) 774
3. Zhou G.F. Mater. Sci. Eng. A 304-306 (2001) 73
4. Privitera S., Bongiorno C., Rimini E., and Zonca R. Appl. Phys. Lett. 84 (2004) 4448
5. Kim S.M., Shin M.J., Choi D.J., Lee K.N., and Park Y.J. Thin Solid Films 469-470 (2004) 322
6. Kim D., Merget F., Laurenzis M., Bolivar P.H., and Kurz H. J. Appl. Phys. 97 (2005) 083538
7. Lee B., Abelson J.R., Bishop S.G., Kang D., Cheong B., and Kim K. J. Appl. Phys. 97 (2005) 093509
8. Friedrich I., Weidenhof V., Njoroge W., Franz P., and Wuttig M. J. Appl. Phys. 87 (2000) 4130
9. Ruitenberg G., Petford-Long A.K., and Doole R.C. J. Appl. Phys. 92 (2002) 3116
10. Rivera-Rodriguez C., Prokhorov E., Trapaga G., Morales-Sanchez E., Hermandez-Landaverde M., Kovalenko Yu., and Gonzalez-Hernandez J. J. Appl. Phys. 96 (2004) 1040
11. Wang K., Steimer C., Wamwangi D., Ziegler S., and Wuttig M. Appl. Phys. A 80 (2005) 1611
12. Shin M.J., Kim S.M., Choi D.J., Lee K.N., Hong S.K., and Park Y.J. J. Mater. Sci. 40 (2005) 1543
13. Alberici S.G., Zonca R., and Pashmakov B. Appl. Surf. Sci. 231-232 (2004) 821
14. Park Y.J., Lee J.Y., Kwon M.S., Kim Y.T., and Lee H.S. J. Appl. Phys. 97 (2005) 093506
15. Zhang G., Gu D., Jiang X., Chen Q., and Gan F. Solid State Commun. 133 (2005) 209
16. Kolobov A.V., Fons P., Frenkel A.I., Ankudinov A.L., Tominaga J., and Uruga T. Nat. Mater. 3 (2004) 703