Mechanism of crystallization of oxygen-doped amorphous Ge 1Sb2Te4 thin films

Journal of Applied Physics

Volumn 96, Issue 2, 2004, Pages 1040-1046

  Rivera Rodriguez C ^a   Prokhorov, E ^a   Trapaga, G ^a   Morales Sanchez E ^a   Hernandez Landaverde, M ^a   Kovalenko, Yu ^a   Gonzalez Hernandez J ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; CRYSTALLIZATION; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRONS; OPTICAL DATA STORAGE; OXYGEN; PHASE TRANSITIONS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTALLINE PHASES; CYCLABILITY; ISOTHERMAL MEASUREMENTS; STRUCTURAL PHASE TRANSFORMATIONS;

SEMICONDUCTING GERMANIUM COMPOUNDS;

EID: 3242669117     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1756223     Document Type: Article

References (19)

1. A. Ebina, M. Hirasaka, and K. Nakatani, J. Vac. Sci. Technol. A 17, 3463 (1999).
2. G. Zhou and B. A. J. Jacobs, Jpn. J. Appl. Phys., Part 1 38, 1625 (1999).
3. D. Z. Dimitrov, Y. Lu, M. Tseng, W. Hsu, and H. Shieh, Jpn. J. Appl. Phys., Part 1 41, 1656 (2002).
4. A. Takase, G. Fujinawa, A. Ebina, M. Hirasaka, and I. Sugiyama, Jpn. J. Appl. Phys., Part 1 41, 2189 (2002).
5. T. H. Jeong, H. Seo, K. L. Lee, S. M. Choi, S. J. Kim, and S. Y. Kim, Jpn. J. Appl. Phys., Part 1 40, 1609 (2001).
6. H. Hermann, N. Mattern, S. Roth, and P. Uebele, Phys. Rev. B 56, 13 888 (1997).
7. J. S. Blazquez, C. F. Conde, and A. Conde, Appl. Phys. A: Mater. Sci. Process. 76, 571 (2003).
8. N. Yamada, E. Ohno, K. Nishiuchi, and N. Akahira, J. Appl. Phys. 69, 2849 (1991).
9. T. Pradell, D. Crespo, N. Clavaguera, and M. T. Clavaguera-Mora, J. Phys.: Condens. Matter 10, 3833 (1998).
10. D. S. McLachlan, J. H. Hwang, and T. O. Mason, J. Electroceram. 5, 37 (2000).
11. D. S. McLachlan, J. Electroceram. 5, 93 (2000).
12. J. Kratos, Analytical Applications Note, "Percent Crystallinity Determination By X-Ray Diffraction" (Shimadzu Corp., Kyoto, Japan, 1999).
13. E. Pineda and D. Crespo, J. Non-Cryst. Solids 317, 85 (2003).
14. E. Morales-Sánchez, E. F. Prokhorov, A. Mendoza-Galván, and J. González-Hernández, J. Appl. Phys. 91, 697 (2002).
15. I. Friedrich, V. Weidenhof, W. Njoroge, P. Franz, and M. Wuttig, J. Appl. Phys. 87, 4130 (2000).
16. T. H. Jeong, M. R. Kim, H. Seo, J. W. Park, and C. Yeon, Jpn. J. Appl. Phys., Part 1 39, 2775 (2000).
17. F. Sánchez-Bajo, A. L. Ortiz, and F. L. Cumbrera, Mater. Sci. Forum 381, 18 (2001).
18. J. W. Christian, Transformations in Metals and Alloys (Pergamon, New York, 1975).
19. A. S. Bakaiy, H. Hermann, and N. P. Lazarev, Philos. Mag. A 82, 1521 (2002).