SCOPUS 정보 검색 플랫폼

Volumn 298, Issue SPEC. ISS, 2007, Pages 328-331

Growth of AlN by vectored flow epitaxy

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ATMOSPHERIC PRESSURE; DUST; ENVIRONMENTAL IMPACT; EPITAXIAL GROWTH; GROWTH (MATERIALS);

GAS PHASE INTERACTION; INVOLATILE ADDUCT; PRECURSOR SEPARATION; VECTORED FLOW EPITAXY;

ALUMINUM NITRIDE;

EID: 33846556172 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2006.10.130 Document Type: Article

Times cited : (8)

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