Plasma density monitoring based on the capacitively- and inductively-coupled-plasma models

Journal of the Korean Physical Society

Volumn 49, Issue SUPPL. 3, 2006, Pages

  Lee, Seok Hwan ^a   Kim, Gon Ho ^a  

^a Seoul National University   (South Korea)

Author keywords

Plasma density; Plasma diagnostics; Plasma source

Indexed keywords

EID: 33846361089     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (14)

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