Fabrication of a 3-dimensional microstructure by sequential anodic oxidation (SAO)

Microelectronic Engineering

Volumn 84, Issue 2, 2007, Pages 308-312

  Kim, Younghun ^a   Kang, Sung Koo ^b   Choi, Inhee ^b   Lee, Jeongjin ^b   Yi, Jongheop ^b  

^a Kwangwoon University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

3D nanopatterning; Anodic oxidation; Scanning probe lithography

Indexed keywords

ANODIC OXIDATION; ENERGY ABSORPTION; FEATURE EXTRACTION; MICROSTRUCTURE; PATTERN RECOGNITION; THREE DIMENSIONAL;

3D NANOPATTERNING; SCANNING PROBE LITHOGRAPHY; SEQUENTIAL ANODIC OXIDATION (SAO);

MICROELECTRONICS;

EID: 33846322549     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.084     Document Type: Article

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