Multilayer three-dimensional photolithography with traditional planar method

Applied Physics Letters

Volumn 85, Issue 17, 2004, Pages 3920-3922

  Yao, Peng ^a   Schneider, Garrett J ^a   Miao, Binglin ^a   Murakowski, Janusz ^a   Prather, Dennis W ^a   Wetzel, Eric D ^b   O'Brien, Daniel J ^b  

^a UNIVERSITY OF DELAWARE   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTIPLE LASER BEAMS; SPATIAL DISTRIBUTION; THREE DIMENSIONAL STRUCTURES; TRANSLATIONAL SYMMETRY;

ABSORPTION; FABRICATION; MOLECULAR WEIGHT; PARAMETER ESTIMATION; PHOTONS; POLYMERIZATION; SOLUBILITY; X RAY ANALYSIS;

PHOTOLITHOGRAPHY;

EID: 9744273149     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1811773     Document Type: Article

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