Insertion force sensor by sidewall-doping with rapid thermal diffusion

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 662-665

  Nguyen, Binh Khiem ^a   Hoshino, Kazunori ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); ELECTRIC POTENTIAL; ETCHING; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; THERMAL DIFFUSION;

PIEZORESISTIVE SENSORS; PIEZORESISTIVITY; SIDEWALL-DOPING;

MICROSENSORS;

EID: 33750125811     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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