Development of monolithic PZT microstage for the application of ultra high-density data storage

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 717-720

  Xu, H G ^a   Okamoto, K ^b   Zhang, D Y ^c   Ono, T ^a   Esashi, M ^d  

^a Department of Nanomechanics ^*  (Japan)

^b NEC TOKIN CORPORATION   (Japan)

^c BEIHANG UNIVERSITY   (China)

^d TOHOKU UNIVERSITY   (Japan)

Author keywords

Bimorph; Data storage; FEM; Microstage; PZT

Indexed keywords

BIOMORPH; DATA STORAGE; MICROSTAGE; PZT;

COMPUTER SIMULATION; DATA STORAGE EQUIPMENT; DEGREES OF FREEDOM (MECHANICS); ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; NATURAL FREQUENCIES;

MICROELECTROMECHANICAL DEVICES;

EID: 27544473329     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496517     Document Type: Conference Paper

References (5)

1. P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, G. K. Binnig., "The 'Millipede' - More than one thousand tips for future AFM data storage," IBM J. RES. DEVELOP. Vol.44, No.3, May, 2000, pp323-340.
2. H. Rothuizen, U. Drechsler, G. Genolet, W. Haberle, M. Lutwyche, R. Stutz, R. Widmer, P. Vettiger, "Fabrication of a Micromachined Magnetic X/Y/Z Scanner for Parallel Scanning Probe Applications" Microelectronic Engineering, Vol. 53, 2000, pp. 509-512
3. C.H. Kim, H.M. Jeong, J.U. Jeon, and Y.K. Kim, "Silicon Micro XY-Stage With a Large Area Shuttle and No-Etching Holes for SPM-Based Data Storage," Journal of Microelectromechanical Systems, Vol. 12, No. 4, August 2003, pp. 470-478.
4. H.G. Xu, K. Okamoto, D.Y. Zhang, T. Ono. M. Esashi, "Monolithic PZT Microstage," Proceedings of the 21st Sensor Symposium, 2004, pp. 13-17
5. D. Y. Zhang, T. Ono, M. Esashi, "Piezoactuator-integrated monolithic microstage with six degrees of freedom," The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, pp. 1518-1521.