SCOPUS 정보 검색 플랫폼

Volumn 913, Issue , 2006, Pages 157-162

Stress and strain measurements in semiconductor device channel areas by convergent beam electron diffraction

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DISLOCATIONS (CRYSTALS); ELECTRON DIFFRACTION; SEMICONDUCTING SILICON COMPOUNDS; STRAIN MEASUREMENT; STRESS ANALYSIS;

CHANNEL AREAS; CONVERGENT ELECTRON BEAM DIFFRACTION (CBED); DISLOCATION LOOPS;

MOS DEVICES;

EID: 33846042148 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-0913-d05-03 Document Type: Conference Paper

Times cited : (11)

References (11)

1
- 3242671509
- T. Ghani, M. Armstrong, C. Auth, M. Bost, P. Charvat, G. Glass, T. Hoffmann, K. Thompson, M. Bohr et, al., IEDM Technical Digest 2003, p978-980
- (2003) IEDM Technical Digest , pp. 978-980
- Ghani, T.¹ Armstrong, M.² Auth, C.³ Bost, M.⁴ Charvat, P.⁵ Glass, G.⁶ Hoffmann, T.⁷ Thompson, K.⁸ Bohr, M.⁹ al¹⁰

2
- 4544284412
- Paper, p48
- P. R. Chidambaram, B. Smith, L. Hall, Y. Kim, P. Jones, R. Irwin, A. Rotondaro, D. T. Grider, et al., 2004 Symp. on VLSI Tech. Diges. of Tech Paper, p48
- (2004) Symp. on VLSI Tech. Diges. of Tech
- Chidambaram, P.R.¹ Smith, B.² Hall, L.³ Kim, Y.⁴ Jones, P.⁵ Irwin, R.⁶ Rotondaro, A.⁷ Grider, D.T.⁸

3
- 20544447617
- S. E. Thompson, G. Sun, K. Wu, J. Lim and T. Nishida, Technical Digest, IEDM (2004), p221-224
- (2004) Technical Digest, IEDM , pp. 221-224
- Thompson, S.E.¹ Sun, G.² Wu, K.³ Lim, J.⁴ Nishida, T.⁵

4
- 33846114679
- Z. Lou, Y. Chong, J. Kim, N. Rovedo, D. Chidambarrao, J. Li, R. Davis, D. Schepis, H. Ng, K. Rim et, al., IEDM Technical Digest (2005), p495-498
- (2005) IEDM Technical Digest , pp. 495-498
- Lou, Z.¹ Chong, Y.² Kim, J.³ Rovedo, N.⁴ Chidambarrao, D.⁵ Li, J.⁶ Davis, R.⁷ Schepis, D.⁸ Ng, H.⁹ Rim, K.¹⁰ al¹¹

5
- 0027112275
- J. M. Zuo, Ultramicroscopy, 41 (1992), p211
- (1992) Ultramicroscopy , vol.41 , pp. 211
- Zuo, J.M.¹

6
- 17544401132
- A. Armigliato, R. Balboni, A. Benedetti, G. P. Carnevale, A. G. Cullis, S. Frabboni and D. Piccolo, Solid State Phenomena, Vol. 82-84 (2002), p727-734
- (2002) Solid State Phenomena , vol.82-84 , pp. 727-734
- Armigliato, A.¹ Balboni, R.² Benedetti, A.³ Carnevale, G.P.⁴ Cullis, A.G.⁵ Frabboni, S.⁶ Piccolo, D.⁷

7
- 0035905252
- A. Toda, N. Ikarashi, and H. Ono, Appl. Phys. Lett., 79 (2001), p 4243
- (2001) Appl. Phys. Lett , vol.79 , pp. 4243
- Toda, A.¹ Ikarashi, N.² Ono, H.³

8
- 4043091241
- L. Clement, R. Pantel, L. F. Tz. Kwakman, J. L. Rouviere, Appl. Phys. Lett., 85 (2004), p651
- (2004) Appl. Phys. Lett , vol.85 , pp. 651
- Clement, L.¹ Pantel, R.² Kwakman, L.F.T.³ Rouviere, J.L.⁴

9
- 0142043394
- I. D. Wolf, V. Senez, R. Balboni, A. Armigliato, S. Frabboni, A. Cedola, S. Lagomarsino, Microelectronic Engineering, 70 (2003), 425-435
- (2003) Microelectronic Engineering , vol.70 , pp. 425-435
- Wolf, I.D.¹ Senez, V.² Balboni, R.³ Armigliato, A.⁴ Frabboni, S.⁵ Cedola, A.⁶ Lagomarsino, S.⁷

10
- 0037070659
- A. Benedetti, A. G. Gullis, A. Armigliato, R. Balboni, S. Frabboni, G. F. Mastracchio, G. Pavia, Appl. Surf. Sci., 188(2002), p214
- (2002) Appl. Surf. Sci , vol.188 , pp. 214
- Benedetti, A.¹ Gullis, A.G.² Armigliato, A.³ Balboni, R.⁴ Frabboni, S.⁵ Mastracchio, G.F.⁶ Pavia, G.⁷

11
- 0038857074
- R. Balboni, S. Frabboni and A. Armigliato, Phil. Mag., A, Vol 77(1998), p67
- (1998) Phil. Mag., A , vol.77 , pp. 67
- Balboni, R.¹ Frabboni, S.² Armigliato, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.