Techniques for mechanical strain analysis in sub-micrometer structures: TEM/CBED, micro-Raman spectroscopy, X-ray micro-diffraction and modeling

Microelectronic Engineering

Volumn 70, Issue 2-4, 2003, Pages 425-435

  De Wolf, I ^a   Senez, V ^b   Balboni, R ^c   Armigliato, A ^c   Frabboni, S ^d   Cedola, A ^c   Lagomarsino, S ^c  

^a IMEC   (Belgium)

^b Institut Superieur de l'Electronique et du Numerique   (France)

^c CNR   (Italy)

^d UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

CBED; Micro Raman spectroscopy; Strain; STREAM; Stress; X ray micro diffraction

Indexed keywords

CORRELATION METHODS; ELECTRON BEAMS; FINITE ELEMENT METHOD; RAMAN SPECTROSCOPY; STRAIN MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

STRAIN ANALYSIS;

STRESS ANALYSIS;

EID: 0142043394     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00372-1     Document Type: Conference Paper

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