Electrical breakdown in the microscale: Testing the standard theory

Journal of Applied Physics

Volumn 100, Issue 12, 2006, Pages

  Hourdakis, Emmanouel ^a   Bryant, Garnett W ^a   Zimmerman, Neil M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BREAKDOWN VOLTAGE MEASUREMENT; FIELD AMPLIFICATION; MICROSCALE; SURFACE PROTRUSIONS;

AIR; AMPLIFICATION; ATOMIC FORCE MICROSCOPY; DATA REDUCTION; ELECTRIC CONDUCTORS; ELECTRIC CURRENTS; ELECTRON EMISSION; VOLTAGE MEASUREMENT;

ELECTRIC BREAKDOWN;

EID: 33846041611     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2400103     Document Type: Article

References (21)

1. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization (CRC, Boca Raton, FL, 2002).
2. H. R. Shea A. Gasparyan, H. B. Chan, S. Arney, R. E. Frahm, D. Lopez, S. Jin, and R. P. McConnell, IEEE Trans. Device Mater. Reliab. 4, 198 (2004).
3. J. Dillon, Gaseous Conductors: Theory and Engineering Applications (Dover, New York, 1958).
4. P. G. Slade and E. D. Taylor, IEEE Trans. Compon. Packag. Technol. 25, 390 (2002).
5. A. Wallash and L. Levit, Proc. SPIE 4980, 87 (2003).
6. D. K. Davies and M. A. Biondi, J. Appl. Phys. 37, 2969 (1966).
7. I. Brodie, J. Appl. Phys. 35, 2324 (1964).
8. W. S. Boyle, P. Kisliuk, and L. H. Germer, J. Appl. Phys. 26, 720 (1955).
9. A. Jankowiak, P. Fourcade, and R. Blanchart, J. Eur. Ceram. Soc. 25, 2821 (2005).
10. G. Sotgiu and L. Schirone, Appl. Surf. Sci. 240, 424 (2005).
11. D. Nicolaescu, J. Vac. Sci. Technol. B 22, 1227 (2004).
12. T. Wang, C. E. Reece, and R. M. Sundelin, J. Vac. Sci. Technol. B 21, 1230 (2003).
13. T. Wang, C. E. Reece, and R. M. Sundelin, Rev. Sci. Instrum. 73 3215 (2002).
14. A. A. Neuber, IEEE Trans. Plasma Sci. 28, 1593 (2000).
15. A. Neuber, J. Appl. Phys. 85, 3084 (1999).
16. R. Gomer, Field Emission and Field Ionization (Harvard University Press, Cambridge, MA, 1961).
17. A. Modinos, Field, Thermionic, and Secondary Electron Emission Spectroscopy (Plenum, New York, 1984), p. 16.
18. F. M. Charbonnier and E. E. Martin, J. Appl. Phys. 33, 1897 (1962).
19. G. T. Boyd, Th. Rasing, J. R. R. Leite, and Y. R. Shen, Phys. Rev. B 30, 519 (1984).
20. E. Hourdakis, B. J. Simonds, and N. M. Zimmerman, Rev. Sci. Instrum. 77, 034702 (2006).
21. D. Porath, O. Millo, and J. I. Gersten, J. Vac. Sci. Technol. B 14, 30 (1996).