Submicron gap capacitor for measurement of breakdown voltage in air

Review of Scientific Instruments

Volumn 77, Issue 3, 2006, Pages

  Hourdakis, Emmanouel ^a   Simonds, Brian J ^a   Zimmerman, Neil M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; DATA REDUCTION; ELECTRIC BREAKDOWN; ELECTRODES; EVAPORATION; GOLD;

ELECTRODE SEPARATIONS; PASCHEN'S LAW; SUBMICRON GAP CAPACITOR;

CAPACITORS;

EID: 33645802018     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2185149     Document Type: Article

References (7)

1. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization (CRC, Boca Raton, FL, 2002).
2. H. R. Shea, IEEE Trans. Device Mater. Reliab. 4, 198 (2004).
3. P. G. Slade and E. D. Taylor, IEEE Trans. Compon. Packag. Technol. 25, 390 (2002).
4. A. Wallash and L. Levit, Proc. SPIE 2003, 87.
5. R.-T. Lee, H.-H. Chung, and Y.-C. Chiou, IEE Proc.: Sci., Meas. Technol. 148, 8 (2001).
6. J.-M. Torres and R. S. Dhariwal, Nanotechnology 10, 102 (1999).
7. J. Dillon, Gaseous Conductors: Theory and Engineering Applications (Dover, New York, 1958).