A lateral super-resolution differential confocal technology with phase-only pupil filter

Optik

Volumn 118, Issue 2, 2007, Pages 67-73

  Qiu, Lirong ^a   Zhao, Weiqian ^a   Feng, Zhengde ^a   Ding, Xuemei ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Confocal microscope; Laser probe; Phase only pupil filter; Super resolution; Surface contour

Indexed keywords

LASER BEAMS; LENSES; MICROSTRUCTURE; NUMERICAL METHODS; OPTIMIZATION; PROBES;

AXIAL RESOLUTION; NUMERICAL APERTURES; PUPIL FILTERING DIFFERENTIAL CONFOCAL MICROSCOPY (PFDCM); ULTRAPRECISION MEASUREMENTS;

OPTICAL RESOLVING POWER;

EID: 33845865540     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijleo.2005.12.013     Document Type: Article

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