Template-nonlithographic nanopatterning for site control growth of InGaN nanodots

Applied Physics Letters

Volumn 89, Issue 24, 2006, Pages

  Wang, Y D ^a,d   Zang, K Y ^a,c   Chua, S J ^a,c   Fonstad, C G ^b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^d STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLED PLASMA ETCHING; NANOPORE ARRAYS; NONLITHOGRAPHIC NANOPATTERNING; NONPATTERNED SURFACES;

ACTIVATION ENERGY; GROWTH KINETICS; LITHOGRAPHY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHOTOLUMINESCENCE; PLASMA ETCHING; SEMICONDUCTING INDIUM COMPOUNDS;

NANOSTRUCTURED MATERIALS;

EID: 33845734655     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2405412     Document Type: Article

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