In-plane load measuring technique for the strength test of MEMS micro-cantilever

Chinese Science Bulletin

Volumn 51, Issue 23, 2006, Pages 2819-2823

  Huan, Yong ^a   Zhang, Taihua ^a   Yang, Yemin ^a  

^a INSTITUTE OF MECHANICS   (China)

Author keywords

In plane; Micro cantilever; Strength; Test

Indexed keywords

EID: 33845692575     PISSN: 10016538     EISSN: 18619541     Source Type: Journal    
DOI: 10.1007/s11434-006-2212-z     Document Type: Article

References (12)

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