Modeling in-plane misalignments in lateral combdrive transducers

Journal of Micromechanics and Microengineering

Volumn 13, Issue 6, 2003, Pages 809-815

  Avdeev, Ilya V ^a   Lovell, Michael R ^a   Onipede Jr , Dipo ^a  

^a University of Pittsburgh   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES;

COMBDRIVE TRANSDUCERS;

TRANSDUCERS;

EID: 0242413073     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/303     Document Type: Article

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